1. Magnification: 4 times to 1 million times; 2. Minimum resolution: 1nm; 3. Accelerating voltage: 200V-30KV; 4. Sample chamber diameter: 300mm wide and 420mm deep.

2 main function editing

1. Equipped with BSE probe, you can observe the phase diagram of the surface morphology and composition of different components of the sample. 2. Equipped with an energy spectrometer to analyze the components of the surface defects of the sample.